✦ LIBER ✦
Lateral diffusion of dopants in a 1 μm N+/P+ polycide gate CMOS process
✍ Scribed by D. Lévy; D.T. Amm; G. Göltz; J. Torrès; P. Delpech; T. Ternisien D'Ouville; H. Mingam; R. Stuck
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 417 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0169-4332
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