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Laser Treatment of Sintered Silicon Carbide Surface for Enhanced Hydrophobicity

✍ Scribed by Yilbas, Bekir Sami; Bhushan, Bharat

Book ID
121347721
Publisher
The Minerals, Metals & Materials Society
Year
2013
Tongue
English
Weight
546 KB
Volume
66
Category
Article
ISSN
1047-4838

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## Abstract Different homo epitaxial 4H‐SiC commercial wafers were undergone hydrogen etching process that was developed in the reaction chamber of a Hot Wall Chemical Vapor Deposition (HWCVD) reactor. We have studied the effects of physical desorption to point out the morphology and the structural