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Laser thermal processing of amorphous silicon gates to reduce poly-depletion in CMOS devices
✍ Scribed by Yung Fu Chong; Gossmann, H.-J.L.; Pey, K.-L.; Thompson, M.O.; Wee, A.T.S.; Tung, C.H.
- Book ID
- 114617414
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 351 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0018-9383
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