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Laser sintering ZnO thick films for gas sensor application

✍ Scribed by Bai Lin Zhu; Chang Sheng Xie; Ai Hua Wang; Jun Wu; Run Wu; Jing Liu

Publisher
Springer
Year
2007
Tongue
English
Weight
370 KB
Volume
42
Category
Article
ISSN
0022-2461

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PZT thick films for sensor and actuator
PZT thick films for sensor and actuator applications
✍ Sylvia Gebhardt; Lutz Seffner; Falko Schlenkrich; Andreas SchΓΆnecker πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 626 KB

PZT thick films with thicknesses between 5 and 150 m are of great interest for microsystems applications where direct coating onto microelectronic substrates and high electromechanical performance are required. Dense PZT thick films have been obtained by combining a PZT-PMN powder with a low melting