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Laser Scanning Lithography for Surface Micropatterning on Hydrogels

✍ Scribed by M. S. Hahn; J. S. Miller; J. L. West


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
310 KB
Volume
17
Category
Article
ISSN
0935-9648

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## Abstract We report the development of laser‐scanning lithography (LSL), which employs a laser‐scanning confocal microscope to pattern photoresists that can be utilized, for example, in the fabrication of masters for use in soft lithography. This convenient technique provides even exposure across