Laser reflection measurements for end point detection and analysis in Nb/Al2O3Al/Nb Josephson circuit fabrication

✍ Scribed by R. Dolata; M. Neuhaus; W. Jutzi

• Book ID: 103946903
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 443 KB
• Volume: 214
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(93)90839-i