✦ LIBER ✦
Laser prototyping of MEMS structures and SiN cantilevers: experience teaching a practical undergraduate course
✍ Scribed by Moore, D.F.; Williams, J.A.
- Book ID
- 114457246
- Publisher
- The Institution of Electrical Engineers
- Year
- 2004
- Tongue
- English
- Weight
- 323 KB
- Volume
- 151
- Category
- Article
- ISSN
- 1350-2344
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