✦ LIBER ✦
Laser photolysis of trimethoxysilane: chemical vapour deposition of nanostructured silicone powders with SiH and SiOCH3 bonds
✍ Scribed by Radmila Tomovská; Zdenĕk Bastl; Jaroslav Bohác̆ek; Josef Pola
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 250 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0268-2605
- DOI
- 10.1002/aoc.397
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✦ Synopsis
Abstract
Gas‐phase photolysis of trimethoxysilane, achieved for the first time by focused ArF laser radiation at 193 nm, yields C~1,2~ hydrocarbons, methanol and carbon monoxide along with ultrafine nanostructured silicone powder possessing SiO~3~ and SiO~4~ configurations and SiH and SiOCH~3~ bonds. The photolytic process, resulting in efficient removal of the methyl groups, is explained as a multitude of steps involving cleavages of all the available bonds. Copyright © 2003 John Wiley & Sons, Ltd.