Laser Micro-Structuring of Fused Silica Subsequent to Plasma-Induced Silicon Suboxide Generation and Hydrogen Implantation

✍ Scribed by Jennifer Hoffmeister; Christoph Gerhard; Stephan Brückner; Jürgen Ihlemann; Stephan Wieneke; Wolfgang Viöl

• Book ID: 119345862
• Publisher: Elsevier
• Year: 2012
• Tongue: English
• Weight: 844 KB
• Volume: 39
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2012.10.080