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Laser interferometric calibration of microscan mechanisms by using three laser beams

✍ Scribed by Osamu Nakamura; Mitsuo Goto

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 681 KB
Volume: 15
Category: Article
ISSN: 0141-6359
DOI: 10.1016/0141-6359(93)90277-h

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