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Laser interferometer with a high-resolution optical microscope for measuring small line scales

✍ Scribed by L. Yu. Abramova; V. M. Baratov; V. L. Fedorin; L. F. Khavinson

Publisher
Springer US
Year
1997
Tongue
English
Weight
210 KB
Volume
40
Category
Article
ISSN
0543-1972

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