Laser-initiated anomalous diffusion of oxygen in a surface silicon layer enriched with defects

✍ Scribed by A. F. Banishev; V. S. Golubev; A. Yu. Kremnev

• Book ID: 110124219
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2000
• Tongue: English
• Weight: 41 KB
• Volume: 26
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1262737