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Laser-induced trench etching of GaAs in aqueous KOH solution

✍ Scribed by Cheon Lee; Mikio Takai; Toshiro Yada; Kazuo Kato; Susumu Namba

Publisher: Springer
Year: 1990
Tongue: English
Weight: 556 KB
Volume: 51
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00324316

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