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Laser induced surface deformations on silicon

✍ Scribed by W. Lüthy; K. Affolter; M. Fuhrer

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 418 KB
Volume: 72
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(79)90527-9

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