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Laser induced plasma in the formation of surface-microstructured silicon

✍ Scribed by Shuying Liu; Jingtao Zhu; Yang Liu; Li Zhao

Book ID
113792178
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
653 KB
Volume
62
Category
Article
ISSN
0167-577X

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Shot-to-shot variation in the characteristics of laser produced plasma plume and surface profile of N-type silicon (1 1 1) are investigated. In order to produce plasma, a Q-switched Nd: YAG laser (1064 nm, 10 mJ, 9-14 ns) is tightly focused on silicon target in air at room temperature. Target was ex