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Laser-induced oxidation of thin tin films

✍ Scribed by M. Wautelet; L. Baufay; M.C. Joliet; R. Andrew


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
258 KB
Volume
129
Category
Article
ISSN
0040-6090

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Thin films of several thicknesses in the form of MIM structures are prepared from the powders of tin oxide (SnO,) by thermal evaporation technique in a vacuum of Torr. The dielectric properties of tin oxide film capacitors have been studied with temperatures varying from 77 to 400 K and also with fr