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Laser-Induced front Side Etching: An Easy and Fast Method for Sub-μm Structuring of Dielectrics

✍ Scribed by Pierre Lorenz; Martin Ehrhardt; Klaus Zimmer


Book ID
119345856
Publisher
Elsevier
Year
2012
Tongue
English
Weight
661 KB
Volume
39
Category
Article
ISSN
1875-3892

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