✦ LIBER ✦
Laser induced fluorescence spectroscopy of WF6/M (M=H2, Ar) gas mixtures during LCVD of W at a high laser energy density
✍ Scribed by P. Heszler; P. Mogyorósi; J.O. Carlsson
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 424 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0169-4332
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