✦ LIBER ✦
Laser-induced direct etching of GaAs using chlorofluorocarbon (CFC) alternative gases
✍ Scribed by Moo-Sung Kim; Cheon Lee; Se Ki Park; Won Chel Choi; Eun Kyu Kim; Seong-Il Kim; Byoung Sung Ahn; Suk-Ki Min
- Book ID
- 107457497
- Publisher
- Springer US
- Year
- 1997
- Tongue
- English
- Weight
- 753 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0361-5235
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