Laser direct writing of aluminum multilevel interconnects for VLSI applications

✍ Scribed by L.M. Treiger; A.A. Popov

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 281 KB
• Volume: 19
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(92)90532-v