Influence of target-substrate distance a
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F. Goerke; A. Thorns
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Article
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1995
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Elsevier Science
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English
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A pulsed KrF excimer laser is used to deposit YBa2Cu30 7 films on MgO (100). We report on the influence of target-substrate distance, oxygen pressure and substrate temperature in the range of 30 to 100 mm, 0.03 to 0.4 mbar and 732 to 800ยฐC, respectively. The film quality is characterized by electric