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Laser deposition of YBa2Cu3O7 films on MgO(100) at 100 mm target-substrate distance and oxygen pressures below 0.1 mbar

โœ Scribed by F. Goerke; A. Thorns; U. Merkt


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
431 KB
Volume
96-98
Category
Article
ISSN
0169-4332

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๐Ÿ“œ SIMILAR VOLUMES


Influence of target-substrate distance a
โœ F. Goerke; A. Thorns ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 658 KB

A pulsed KrF excimer laser is used to deposit YBa2Cu30 7 films on MgO (100). We report on the influence of target-substrate distance, oxygen pressure and substrate temperature in the range of 30 to 100 mm, 0.03 to 0.4 mbar and 732 to 800ยฐC, respectively. The film quality is characterized by electric