Laser chemical processing for microelectronics: Edited by K. G. Ibbs & R. M. Osgood. Cambridge Studies in Modern Optics: 7 Cambridge University Press, 1989. ISBN 0-521-32254-5. 170 pp.

✍ Scribed by Maurice Kimmitt

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 64 KB
• Volume: 13
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/0143-8166(90)90043-9