Laser-Beam Interaction with Defects on Semiconductor Surfaces: An Approach to Generation of Defect-Free Surfaces

✍ Scribed by Itoh, N; Kanasaki, J; Okano, A; Nakai, Y

• Book ID: 120633371
• Publisher: Annual Reviews
• Year: 1995
• Tongue: English
• Weight: 893 KB
• Volume: 25
• Category: Article
• ISSN: 0084-6600
• DOI: 10.1146/annurev.ms.25.080195.000525