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Laser action on thermal diffusion of gases

✍ Scribed by N. V. Karlov; Yu. N. Petrov; I. V. Fedorov


Publisher
Springer US
Year
1981
Tongue
English
Weight
902 KB
Volume
2
Category
Article
ISSN
1573-8760

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The electromagnetic field of lasers and non-equilibrium doping conditions enable laser doping of SiC with increased dopant diffusivity. Chromium, which acts as a double acceptor, has been laser-doped in SiC wafers. A thermal model is utilized to determine the temperature distribution at various dept