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Laser ablation deposition of silicon nanostructures

✍ Scribed by J. Levoska; M. Tyunina; S. Leppävuori

Book ID
117675976
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
371 KB
Volume
12
Category
Article
ISSN
0965-9773

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## Abstract This paper describes the properties of silicon nanostructures synthesized by laser ablation. This is an extremely flexible technique allowing the fabrication of different kinds of nanostructures including porous films and Si nanocrystals embedded in Si oxide. Quantum confinement effects