Laser ablation deposition as a preparation method for sensor materials

✍ Scribed by S. Leppävuori; J. Levoska; A.E. Hill; R.D. Tomlinson; J. Frantti; O. Kusmartseva; H. Moilanen; R.D. Pilkington

• Book ID: 103959660
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 487 KB
• Volume: 41
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(94)80103-7

✦ Synopsis

In the development of new matenals for sensors, laser ablation deposition (LAD) offers a relamely easy techmque to reahse complicated material composltmns and multllayer structures In this paper, LAD of three different thm films for sensor and actuator materials was camed out usmg a Q-mtched Nd YAG laser and an XeCl excuner laser CuInSe, (US) and Cu(In, Ga)Se, (GIGS) are well-estabhshed as exceptionally eficlent semtcnnductors with potential applications m the fields of solar cells, mfrared radlatron momtors and fibre optic Infrared detectors CIS and GIGS thm fdms were deposlted by an ua srtu process on fused sd~ca and smgle crystal s&con substrates The composltlon of the target mate& was largely mamtamed m the thm films Lead znconmm Utanate (PZT) mate&s are arldely used m sensor and actuator apphcatlons Laser ablation has been used to produce plezoelectnc thm films for use m a low voltage cantdever blmorph actuator structure Nd-doped PZT films were deposIted on to .&g-coated oxldlsed s&con substrates Displacements m the order of microns were obtamed from a 15 mm long element Diamond-hke carbon thm films also have potential m sensor apphcatlons By varymg the peak power density of the laser beam and the deposItton temperature, It was found to be possible to tador the electrical and opt& proper&s of the deposited films between the extremes of dramond-hke and graphite-like carbon