Large travel ultra precision x-y-&thetas; motion control of a magnetic-suspension stage

✍ Scribed by Shih-Kang Kuo; Ximin Shan; Chia-Hsiang Menq

• Book ID: 117923822
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 475 KB
• Volume: 8
• Category: Article
• ISSN: 1083-4435
• DOI: 10.1109/tmech.2003.816825