Large-Scale Synthesis of Water Dispersible Ceria Nanocrystals by a Simple Sol–Gel Process and Their Use as a Chemical Mechanical Planarization Slurry

✍ Scribed by Taekyung Yu; Yong Il Park; Min-Cheol Kang; Jin Joo; Jin Kyung Park; Ho Youn Won; Jae Jeong Kim; Taeghwan Hyeon

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 255 KB
• Volume: 2008
• Category: Article
• ISSN: 1434-1948
• DOI: 10.1002/ejic.200700979