Development of a hybrid sputtering/evapo
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M. Acciarri; S. Binetti; A. Le Donne; B. Lorenzi; L. Caccamo; L. Miglio; R. Mone
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Article
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2011
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John Wiley and Sons
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English
β 286 KB
## Abstract In this paper we report a new method for Cu(In,Ga)Se~2~ deposition for solar cell application. Differently from the common coβevaporation process, an alterative approach for thin film Cu(In,Ga)Se~2~ has been tested: the sputtering deposition of metal elements combined with the selenium