Large range and high resolution on-line displacement measurement system by combining double interferometres

✍ Scribed by Xie, Fang; Li, Min; Song, Ding; Sun, Jinling; Zhang, Tao

• Book ID: 115413729
• Publisher: Optical Society of America
• Year: 2010
• Tongue: English
• Weight: 900 KB
• Volume: 18
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.18.024961