✦ LIBER ✦
Large grain polycrystalline silicon by low-temperature annealing of low-pressure chemical vapor deposited amorphous silicon films: Miltiadis K Hatalis and David W Greve, J appl Phys, 63, 1988, 2260–2266
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 159 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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