✦ LIBER ✦
Large grain poly-Si(∼rm 10μm) TFTs prepared by excimer laser annealing through a thick SiON absorption layer
✍ Scribed by Sheng-Da Liu; Si-Chen Lee
- Book ID
- 114617313
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 810 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0018-9383
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