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Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings

✍ Scribed by Xu, Junqi; Fan, Huiqing; Liu, Weiguo; Hang, Lingxia


Book ID
120614145
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
354 KB
Volume
17
Category
Article
ISSN
0925-9635

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