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Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate

✍ Scribed by Le Harzic, R.; Dörr, D.; Sauer, D.; Neumeier, M.; Epple, M.; Zimmermann, H.; Stracke, F.


Book ID
115434161
Publisher
Optical Society of America
Year
2011
Tongue
English
Weight
490 KB
Volume
36
Category
Article
ISSN
0146-9592

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