KrF-laser without buffer gas excited in a capacitively coupled discharge tube

✍ Scribed by J. de la Rosa; H.-J. Eichler

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 161 KB
• Volume: 64
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/0030-4018(87)90394-4