Kinetics study of orientation-dependent surface blistering and exfoliation process in hydrogen-implanted germanium

✍ Scribed by Chien, C. C.; Chao, D. S.; Liang, J. H.

• Book ID: 127302078
• Publisher: John Wiley and Sons
• Year: 2014
• Tongue: English
• Weight: 679 KB
• Volume: 46
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.5602