Kinetics of the initiation step of the thermal decomposition of SiCl4

✍ Scribed by L. Catoire; D. Woiki; P. Roth

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 126 KB
• Volume: 29
• Category: Article
• ISSN: 0538-8066
• DOI: 10.1002/(sici)1097-4601(1997)29:6<415::aid-kin2>3.0.co;2-x

✦ Synopsis

The initiation reaction of the thermal decomposition of silicon tetrachloride (R1) was studied behind reflected shock waves at temperatures between 1550 K and 2370 K and pressures between 1 and 1.5 bar. Atomic resonance absorption spectrometry (ARAS) was applied for time-resolved measurements of H atoms at the L ␣ -line in SiCl 4 /H 2 /Ar systems. Additional experiments were performed in the SiCl 4 /Ar system following the absorption of SiCl 4 at the L ␣ -line. Rate coefficients for the reaction (R1) were determined to be:

The choice between two possible alternatives of the first decomposition step, namely elimination of either Cl 2 or Cl, has been made in favor of the second reaction on the basis of kinetic and energetic considerations.