Kinetics of polyimide etching by supersonic beams consisting of atomic and molecular oxygen mixtures

✍ Scribed by A.P. Nikiforov; V.E. Skurat

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 890 KB
• Volume: 212
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(93)87105-c