Kinetics of O2+ TEOS gas-phase chemical reactions in a remote RF plasma reactor with electron spin resonance

✍ Scribed by J. Janča; A. Tálský; V. Zvoníček

• Book ID: 105244413
• Publisher: Springer
• Year: 1996
• Tongue: English
• Weight: 302 KB
• Volume: 16
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/bf01570177