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Kinetics of laser-induced liquid metal etching of a-Si films

✍ Scribed by Bostanjoglo, O. ;Endruschat, E. ;Tornow, W.

Book ID
105378563
Publisher
John Wiley and Sons
Year
1985
Tongue
English
Weight
730 KB
Volume
90
Category
Article
ISSN
0031-8965

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## Abstract Quantum structures were fabricated by immersing a crystalline silicon (Si) or germanium (Ge) wafer in hydrofluoric acid followed by laser‐induced etching with a laser photon energy of 2.41 eV. Atomic force microscopy (AFM) investigations of Si(100) etched samples reveal a complex surfac