✦ LIBER ✦
Kinetics and mechanisms of chemical reactions in nonequilibrium-plasma etching of silicon and silicon compounds: G K Vinogradov et al,Vacuum, 32 (9), 1982, 529–537
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 170 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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