Kinetic Simulation of a Time-Dependent Two-Dimensional Plasma

✍ Scribed by W.N.G. Hitchon; E.R. Keiter

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 376 KB
• Volume: 112
• Category: Article
• ISSN: 0021-9991
• DOI: 10.1006/jcph.1994.1094

✦ Synopsis

The distribution function of ions is calculated in a two-dimensional plasma with a rapidly expanding sheath, self-consistently with the electrostatic potential, (\phi). The numerical procedure consists of a direct solution of an integral form of the kinetic equation. This solution relies on the use of a simple form for the Green's function which describes the time-evolution of the distribution, which has previously been used in one spatial dimension and is here extended to two dimensions. The electron density (n_{e}) is assumed to be described by the Boltzmann relation. (n_{n}, n_{0}) exp) (cD/ (\left./ T_{n}\right)), allowing Poisson's equation to bo solved for (\Phi) self-consistently with the ion density. This procedure is applied to descritse the plasna surrounding a "target" to which is rapidly applied a harge negative potential, as occurs in plasma source ion implantation (PSII). The ion distribution striking the target is calculated to allow determination of the dose and depth profile. IC) 1994 Academic Press. tnc.