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Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K

โœ Scribed by Nikolai M. Rubtsov; Georgii I. Tsvetkov; Victor I. Chernysh


Book ID
111730649
Publisher
Royal Society of Chemistry
Year
2006
Tongue
English
Weight
402 KB
Volume
16
Category
Article
ISSN
0959-9436

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