✦ LIBER ✦

Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure

✍ Scribed by Chason, E.; Shin, J. W.; Hearne, S. J.; Freund, L. B.

Book ID: 111657686
Publisher: American Institute of Physics
Year: 2012
Tongue: English
Weight: 825 KB
Volume: 111
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.4704683

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