✦ LIBER ✦
Kinetic aspects of selective epitaxial growth using a rapid thermal processing system
✍ Scribed by J. Mercier; J.L. Regolini; D. Bensahel; E. Scheid
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 822 KB
- Volume
- 94
- Category
- Article
- ISSN
- 0022-0248
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