✦ LIBER ✦
Kinematic design of large displacement precision XY positioning stage by using cross strip flexure joints and over-constrained mechanism
✍ Scribed by Yeong-jun Choi; S.V. Sreenivasan; Byung Jin Choi
- Book ID
- 108206478
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 1011 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0094-114X
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