✦ LIBER ✦

Journals and other publications received by the editor

Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 101 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)81109-2

No coin nor oath required. For personal study only.

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Source is available. It contains data showing film thickness distribution and deposition rates obtained with the Orbitorr. Theory of operation and the unique ability of the Orbitorr to achieve high target utilization efficiency are also described.

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