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[Journal of the Physical Society of Japan Proceedings of the 12th Asia Pacific Physics Conference (APPC12) - Makuhari, Japan (July 14–19, 2013)] Proceedings of the 12th Asia Pacific Physics Conference (APPC12) - Correlation between Nanoparticle Growth and Plasma Parameters in Low Pressure Reactive VHF Discharge Plasmas

✍ Scribed by Shiratani, Masaharu; Morita, Yasuhiko; Kamataki, Kunihiro; Seo, Hyunwoong; Uchida, Giichiro; Itagaki, Naho; Koga, Kazunori

Book ID
126903487
Publisher
Journal of the Physical Society of Japan
Year
2014
Weight
378 KB
Category
Article
ISBN-13
9784890271016

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