✦ LIBER ✦
Joint Russian and Bulgarian Academies of Sciences Database of Intermolecular Potentials and Diffusion Coefficients for Components of the CVD Processes in Microelectronics
✍ Scribed by L. Fokin; V. Popov; A. Kalashnikov; L. Zarkova; P. Pirgov; I. Petkov
- Book ID
- 110316803
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 100 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0195-928X
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