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[Japan Soc. Appl. Phys 2003 Symposium on VLSI Circuits. Digest of Technical Papers - Kyoto, Japan (12-14 June 2003)] 2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408) - Very wide tuning range micro-electromechanical capacitors in the MUMPs process for RF applications

✍ Scribed by Tsang, T.K.K.; El-Gamal, M.N.

Book ID: 121008741
Publisher: Japan Soc. Appl. Phys
Year: 2003
Tongue: Japanese
Weight: 387 KB
Category: Article
ISBN-13: 9784891140342
DOI: 10.1109/VLSIC.2003.1221154

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